The TURBOVAC i/X line of turbomolecular pumps from Oerlikon Leybold Vacuum allows the user to optimize pump down times and consistently hit targets in terms of pressures and gas flows. Designed to offer best performance/size ratio in the ISO 100 and 160 size range, the pumps feature cutting-edge rotor and drag stage design resulting in high performance and unparalleled speed, especially for light gases. Suitable for UHV applications and compact pump system solutions.
With a light gas pumping speed of up to 60% above current reference products and compression values around 100 times greater than previous generation products, the pumps can be suitably backed with small backing pumps. The result is a considerably smaller vacuum system, lower initial and operating costs and a more compact footprint.
The systems are highly reliable, providing high productivity and system up-time. An integrated lifetime lubrication system that never needs an oil change, and a maintenance- and oil-free hybrid bearing system, results in great reliability and durability.
The simply supported shaft system results in a low vibration pump design which reduces noise, mechanical stress and negative impact on vibration sensitive applications. Optimized cooling of the bearings is ensured through thermal isolation and a highly efficient motor. The pump also comes equipped with a purge port that protects the bearings from critical gases and particles. Intlvac