AttoMap software enables 3D imaging of spectroscopic information obtained using cathodoluminescence (CL) technology, which integrates a scanning electron microscope and a light microscope into high-resolution spectroscopy instruments used to characterize semiconductors, solar cells and other nano devices. 3D visualization of spectroscopic information in the software makes it easier for researchers and quality engineers to locate and characterize features and defects on these devices and other nanoscale objects. The software is based on Digital Surf’s Mountains Technology.
Attolight’s CL microscope generates images containing up to 1,600 colours. Visualizing such images, called hyperspectral maps, is a real challenge since the human eye can perceive only the three primary colours, red, green and blue, and mixtures of these colours.
The software provides a solution to this problem. First, it allows the user to convert relevant spectral bands into colours that he or she can perceive, such as red, green and blue. The software then automatically generates a 2D RGB image that is both friendly to the human eye and makes it easy for the user to see the location of specific spectral features. Finally, the image is transformed into a 3D map, where the third dimension corresponds to the cathodoluminescence intensity. It is a very convenient method for understanding how intense each spectral band is compared to other bands. This 3D map can be modified in real time to facilitate inspection.
In addition to processing cathodoluminescence data, the software works with images and surface data from other microscopes including scanning electron microscopes (SEMs), scanning probe microscopes (SPMs) and 3D optical profilers. It can co-localize images and data from different instruments for correlative studies. Working with measured or reconstructed 3D surface topography data it can be used for surface metrology applications, calculating areas, volumes, step heights and surface roughness parameters and carrying out 3D Fourier analysis, particles analysis, statistical analysis and more.
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