Now offering both an analytical mode, with beam currents up to100nA, and an imaging mode, with resolution of 1.4nm at 1kV, the Versa 3D DualBeam system has the ability to image fine surface detail at low accelerating voltages without compromising its analytical performance at high voltages and beam currents. It combines the low-voltage imaging performance of a monochromated FEG source with the versatility and ease-of-use of a non-immersion objective lens. It can provide high-resolution images of fine surface detail on the widest range of specimens, including non-conductive, magnetic and light-element materials, and large or odd shaped samples.
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